Two Chamber System

Dosing system

A proximity probe is used when the accuracy of the dosages depends on small bath fluctuations.

Advantages:

• no oxide build-up
• inexpensive

Charging system

A submerged probe is used in the fusion chamber for greater fluctuations in the charging.

Monitoring with a submerged and a proximity probe 1 electronic control system for Low-cost system for simple process cycles:

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Alt. solution: Monitoring with a submerged and a proximity probe 2 electronic control systems for flexible measuring possibility for independent process cycles:

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